Wafer sojourn time fluctuation caused by activity time variation in dual-arm cluster tools

Document Type

Conference Proceeding

Publication Date

1-1-2009

Abstract

With wafer residency time constraints, wafer sojourn time in a processing module should be carefully controlled such that it is in a permissive range. Activity time variation often results in wafer sojourn time fluctuation and makes an originally feasible schedule infeasible. Thus, it is very important to know how the wafer sojourn time changes when activity time varies. With proposed Petri net (PN) model and real-time control policy, this paper analyzes the effect of activity time variation on wafer sojourn time delay and presents its upper bounds in dual-arm cluster tools. © 2009 IFAC.

Identifier

79960948881 (Scopus)

ISBN

[9783902661449]

Publication Title

IFAC Proceedings Volumes IFAC Papersonline

External Full Text Location

https://doi.org/10.3182/20090610-3-it-4004.00007

ISSN

14746670

First Page

10

Last Page

15

Issue

PART 1

Volume

2

Grant

60574066

Fund Ref

Ministry of Education

This document is currently not available here.

Share

COinS