A novel approach to scheduling of single-arm cluster tools with wafer revisiting

Document Type

Conference Proceeding

Publication Date

11-12-2009

Abstract

This paper conducts a study for scheduling single-arm cluster tools with typical wafer revisiting pattern (mi, mi+1)k where i means the ith-step and mi and mi+1 mean the corresponding quantity of the modules in i and i+1-th steps, and k the number of visiting times. With a Petri net (PN) model, it is shown that, mi=mi+1 =1, the optimal schedule for the revisiting process is deterministic and unique, and the minimal cycle time can be calculated by an analytical expression. It is also shown that, when mi = 1 and mi+1 = 2 or mi = 2 and mi+1 = 1, the optimal one-wafer cyclic schedule for the revisiting process can be obtained in k deterministic schedules by comparing their cycle times. Based on the scheduling and cycle time analysis of a revisiting process, a novel method is presented to schedule the overall system by treating the revisiting process as a macro step. © 2009 IEEE.

Identifier

70449127608 (Scopus)

ISBN

[9781424445783]

Publication Title

2009 IEEE International Conference on Automation Science and Engineering Case 2009

External Full Text Location

https://doi.org/10.1109/COASE.2009.5234146

First Page

567

Last Page

572

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