Robust Scheduling of Time-Constrained Dual-Arm Cluster Tools with Wafer Revisiting and Activity Time Disturbance

Document Type

Article

Publication Date

6-1-2019

Abstract

Wafer revisiting and residency time constraints complicate the scheduling problem of cluster tools in semiconductor manufacturing. Random disturbance to the activity time in operating a tool further complicates such a scheduling problem. To solve this challenging problem, this paper proposes a robust real-time schedule which consists of a real-time controller (RTC) and an off-line schedule. The former is developed to offset the activity time disturbance such that the wafer sojourn time fluctuation in a process module is minimized. With the RTC, to find the off-line schedule, necessary and sufficient schedulability conditions under which a feasible schedule exists are derived and these conditions can be easily checked. Then, the off-line schedule can be efficiently found by the proposed algorithms based on nondisturbed activity time if a feasible schedule exists. With the obtained real-time schedule, it is shown that the productivity of the system is maximized. Finally, examples are used to illustrate the proposed approach.

Identifier

85059048041 (Scopus)

Publication Title

IEEE Transactions on Systems Man and Cybernetics Systems

External Full Text Location

https://doi.org/10.1109/TSMC.2017.2721979

e-ISSN

21682232

ISSN

21682216

First Page

1228

Last Page

1240

Issue

6

Volume

49

Grant

61673123

Fund Ref

National Natural Science Foundation of China

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