Growth of single-walled carbon nanotubes by microwave plasma enhanced chemical vapor deposition

Document Type

Conference Proceeding

Publication Date

1-1-2004

Abstract

Single-walled carbon nanotubes (SWCNTs) have been grown for the first time by microwave plasma-enhanced chemical vapor deposition (PECVD) at 800°C using methane as the precursor and bimetallic Mo/Co catalyst supported on MgO dispersed on a silicon wafer. The nanotubes grown consist of bundles, each composed of individual tubes of a single diameter associated with either metallic or semiconducting SWCNTs, based on characterization by Raman spectroscopy. Field-emission scanning electron microscopy and atomic force microscopy show that the bundles are relatively thin - 5 to 10 nm in diameter - and up to a few micrometers in length. The results are compared with those obtained on recently reported SWCNTs grown by radio frequency PECVD. © 2005 Materials Research Society.

Identifier

34249943317 (Scopus)

ISBN

[1558998101, 9781558998100]

Publication Title

Materials Research Society Symposium Proceedings

External Full Text Location

https://doi.org/10.1557/proc-858-hh1.3

ISSN

02729172

First Page

1

Last Page

13

Volume

858

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