Recent advances in semiconductor factory automation, Part 2: Equipment-level automation

Authors

Mu Der Jeng, National Taiwan Ocean University
Mengchu Zhou, New Jersey Institute of Technology
Thomas Wen Yao Chen, Taiwan Semiconductor Manufacturing Company

Document Type

Editorial

Publication Date

9-1-2004

Identifier

19544381365 (Scopus)

Publication Title

IEEE Robotics and Automation Magazine

External Full Text Location

https://doi.org/10.1109/MRA.2004.1337818

ISSN

10709932

First Page

4

Issue

3

Volume

11

Recommended Citation

Jeng, Mu Der; Zhou, Mengchu; and Chen, Thomas Wen Yao, "Recent advances in semiconductor factory automation, Part 2: Equipment-level automation" (2004). Faculty Publications. 20248.
https://digitalcommons.njit.edu/fac_pubs/20248