Simulation and modeling of a bridge-type resonant beam for a coriolis true mass flow sensor

Document Type

Conference Proceeding

Publication Date

11-2-2004

Abstract

This paper presents a simulation of a bridge-type resonating beam connected to the tube loop structure of a Coriolis true mass flow sensor[1]. The resonant beam technique, which is comparable to optical[2], piezoresistive[3], and capacitive[4] detection methods, is used to detect the vertical amplitude change of the tube-loop structure according to the Coriolis force of true mass flow by measuring the frequency shift of the resonating beam. The focus of this paper will be on the frequency shift caused by the amplitude of the bending mode of vibration, and the electrostatic pull-in effect as a measurement method for the frequency shift.

Identifier

6344250923 (Scopus)

ISBN

[0972842276, 9780972842273]

Publication Title

2004 Nsti Nanotechnology Conference and Trade Show Nsti Nanotech 2004

First Page

351

Last Page

354

Volume

2

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