Silicon-integrated uncooled infrared detectors: Perspectives on thin films and microstructures

Document Type

Conference Proceeding

Publication Date

1-1-2005

Abstract

Uncooled infrared (IR) photodetectors for telecommunications, optical processor interconnects, and focal plane arrays are advantageously integrated into systems that are silicon based through advanced thin-film technologies. This paper reviews challenges of materials, microstructures, interfaces, and reactions of thin-film materials and technologies posed by such applications.

Identifier

20344375468 (Scopus)

Publication Title

Journal of Electronic Materials

External Full Text Location

https://doi.org/10.1007/s11664-005-0055-z

ISSN

03615235

First Page

484

Last Page

490

Issue

5

Volume

34

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