An ultra-sensitive optical MEMS sensor for partial discharge detection

Document Type

Article

Publication Date

3-1-2005

Abstract

A diaphragm-based interferometric fiber optical microelectromechanical system sensor with high sensitivity is designed and tested for on-line detection of the acoustic waves generated by partial discharges (PD) inside high-voltage power transformers. In principle, the sensor is made according to Fabry Perot interference, which is placed on a micro-machined rectangular silicon membrane as a pressure-sensitive element. A fiber-optic readout scheme has been used to monitor sensor membrane deflection. Sensor design, fabrication, characterization, and application in PD acoustic detection are described. Test results indicate that the fiber optical sensor is capable of detecting PD acoustic signals propagating inside transformer oil with high sensitivity. © 2005 IOP Publishing Ltd.

Identifier

15744362048 (Scopus)

Publication Title

Journal of Micromechanics and Microengineering

External Full Text Location

https://doi.org/10.1088/0960-1317/15/3/012

ISSN

09601317

First Page

521

Last Page

527

Issue

3

Volume

15

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