Nonlinear mechanics of MEMS plates with a total Lagrangian approach

Document Type

Article

Publication Date

4-1-2005

Abstract

The subject of this paper is a fully Lagrangian approach for coupled (mechanical deformations caused by applied electric fields) analysis of Micro-Electro-Mechanical (MEM) plates. The analysis is carried out by employing the two-dimensional (2-D) Finite Element Method (FEM) to analyze mechanical deformations in the plate and the three-dimensional (3-D) Boundary Element Method (BEM) to obtain the electric field (and then tractions on the plate surface) in the region exterior to the plate. Self-consistent solutions to the coupled problem are obtained by the relaxation method. Such simulations, especially their dynamic version, has many potential applications such as to understand and design synthetic microjets. © 2004 Elsevier Ltd. All rights reserved.

Identifier

14044265636 (Scopus)

Publication Title

Computers and Structures

External Full Text Location

https://doi.org/10.1016/j.compstruc.2004.08.023

ISSN

00457949

First Page

758

Last Page

768

Issue

10-11 SPEC. ISS.

Volume

83

Grant

01-2042-007-25

Fund Ref

National Science Foundation

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