Hydrothermal growth of epitaxial PZT

Document Type

Conference Proceeding

Publication Date

12-13-2005

Abstract

This paper describes a paradigm processing approach for the crystallization and growth of ferroelectric thin films by hydrothermal epitaxy. Following this approach, studies investigating the influence of solution composition, suspended phase characteristics, reactor-based variables, and temperature are all factored into targeting optimum conditions for the growth of large crystals. As an illustrative example, results for the hydrothermal epitaxy of lead zirconate titanate (PZT) films on strontium titanate substrates are reported. Films grown from zirconium-titanium hydrous oxides suspended in electrolyte solutions are used to grow transparent, oriented, and pore-free films at thicknesses as large as 1 μm. Crystals as thick as 25 μm can also be grown, but with a loss of epitaxy and the introduction of porosity. Systematic studies of key process variables suggest a particle impingement modulated crystallization mechanism and the implications of this mechanism on the design of crystallizers for robust of PZT film growth are briefly discussed.

Identifier

28544452611 (Scopus)

Publication Title

Proceedings Electrochemical Society

First Page

181

Last Page

189

Volume

PV 2003-29

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