Dc And Rf Performance Of Gaas Mesfet Fabricated On Silicon Substrate Using Epitaxial Lift-Off Technique

Document Type

Article

Publication Date

1-1-1990

Abstract

GaAs MESFETs have been fabricated on a silicon substrate using a molecular beam epitaxy grown film detached from its growth substrate and attached on a silicon substrate covered with a dielectric. The device processing is done on the silicon substrate. The MESFETs exhibit IDSS= 130mA/mm, gm=135mS/mm and for 1.3μm gate length unity current gain cut-off frequency fTof 12 GHz. Excellent device isolation with subpicoampere leakage currents is obtained. © 1990, The Institution of Electrical Engineers. All rights reserved.

Identifier

0025508008 (Scopus)

Publication Title

Electronics Letters

External Full Text Location

https://doi.org/10.1049/el:19901199

ISSN

00135194

First Page

1865

Last Page

1866

Issue

22

Volume

26

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