Microengineered sensors: A review

Document Type

Conference Proceeding

Publication Date

1-1-1991

Abstract

Recently the application of bulk and surface processing of silicon related materials has made it possible to successfully fabricate micromechanical structures in the range of 0.5 to 500 microns, which exhibits unrestrained motion over at least one degree of freedom. The sculptural fabrication techniques can be used to realize a variety of measurement devices (microengineered sensors). This paper describes the recent developments in the area of design, fabrication and operation of these microengineered sensors. The possible integration of the sensing elements with the signalprocessing circuit on one chip (the so called smart sensors) is also being discussed briefly.

Identifier

85067895294 (Scopus)

Publication Title

Electro International Electr 1991 Conference Record

External Full Text Location

https://doi.org/10.1109/ELECTR.1991.718181

First Page

92

Last Page

97

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