Laser-induced etched grating on InP for integrated optical circuit elements

Document Type

Conference Proceeding

Publication Date

1-1-1991

Abstract

Based on a non-linear coupling between the etchant species and the photo-induced carriers during photo-electrochemical etching of semiconductor surfaces, we propose that the reaction residue, the oxide layer, regulates the reaction.

Identifier

0026404949 (Scopus)

ISBN

[0819407143, 9780819407146]

Publication Title

Proceedings of SPIE the International Society for Optical Engineering

External Full Text Location

https://doi.org/10.1117/12.50910

ISSN

0277786X

First Page

331

Last Page

337

Volume

1583

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