Experimental study of electric suspension for microbearings

Document Type

Article

Publication Date

1-1-1992

Abstract

Electric susnension bearings with onen-loon stability have been proposed as a solution to the problem of surface contact friction resulting from the instability of rotors in micromotors. The proposed electric suspension is an open-loop stable system, which does not require the use of feedback sensors and controllers. A proof of concept experiment of the electric suspension is reported in this paper. The experiment consists of levitating and holding a small flat plate in a stable equilibrium under a stator using the electric suspension design. The open-loop stability of the electric suspension is confirmed by photographing the gap between the suspended plate and the stator seen through a microscope. In addition, a gap measurement scheme based on a reflective sensor technique is implemented as a second means to verify stable levitation. The electric suspension is greatly compatible with small scale devices and systems and can be utilized to develop frictionless microactuators. © 1992, IEEE. All rights reserved.

Identifier

0026835740 (Scopus)

Publication Title

Journal of Microelectromechanical Systems

External Full Text Location

https://doi.org/10.1109/84.128052

e-ISSN

19410158

ISSN

10577157

First Page

23

Last Page

30

Issue

1

Volume

1

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