Numerical computation of higher-order chromatic aberrations for rotationally symmetric electrostatic lenses

Document Type

Article

Publication Date

12-1-1992

Abstract

In the present paper third order chromatic aberrations have been computed for an immersion lens and an einzel lens based on canonical aberration theory. The electron trajectories with up to third order chromatic aberrations have been compared with the real trajectories. They are in good agreement, and the computational errors are believed to be about 0.2%. Therefore, the canonical theory of higher order chromatic aberration has been verified. As a practical application, for a typical electrostatic lens, the first, third order chromatic aberrations and the third order geometric aberrations, which are functions of the object side beam half-angle, have been presented in detail. It is expected that the results are useful for designing and optimizing a low chromatic aberration electrostatic lens.

Identifier

36449009089 (Scopus)

Publication Title

Journal of Applied Physics

External Full Text Location

https://doi.org/10.1063/1.352133

ISSN

00218979

First Page

28

Last Page

32

Issue

1

Volume

72

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