Theoretical calculation of probe size of low‐voltage scanning electron microscopes

Document Type

Article

Publication Date

1-1-1993

Abstract

Detailed investigating into the effects of spherical and chromatic aberrations, diffraction and the probe current allows the more general formulae for the optimized aperture and the minimum probe radius in low‐voltage scanning electron microscopes (LVSEMs) to be derived using both wave optics and geometric optics. The probe sizes for a diversity of electron sources in LVSEMs have been estimated, which may be useful for practical applications. The computed results indicate the possibility of achieving 1·5–2·0‐nm resolution at low voltages. 1993 Blackwell Science Ltd

Identifier

0027159684 (Scopus)

Publication Title

Journal of Microscopy

External Full Text Location

https://doi.org/10.1111/j.1365-2818.1993.tb03330.x

e-ISSN

13652818

ISSN

00222720

First Page

119

Last Page

124

Issue

2

Volume

170

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