Effects of electron radiation on the optical constants of p-type silicon

Document Type

Conference Proceeding

Publication Date

1-1-1993

Abstract

The optical constants n and k are determined for p-type silicon at the E0 and E1 and critical point energies for one MeV electron irradiated samples. The value for fluences of 1014 and 1016 e-/cm2 are compared to samples before irradiation. The real, ε1, and imaginary, ε2, components of the dielectric function, ε, used to find n and k, were obtained by measurement of tanψ and δ using spectroscopic ellipsometry (SE). The data show that changes in δ, in particular, are greater in the region about E0 than of E1. This is consistent with electrolyte electroreflectance (EER) results in which the Lorentz line shape is narrower for E0 than for E1. The value of n is found to increase and k to decrease with e- radiation at the critical points, although, neither does so monotonically. The change in n at the E0 critical point is greater than at the higher energy main structure E1 whereas, k is a slower varying function in this region.

Identifier

0027192562 (Scopus)

ISBN

[1558992073, 9781558992078]

Publication Title

Materials Research Society Symposium Proceedings

External Full Text Location

https://doi.org/10.1557/proc-302-591

ISSN

02729172

First Page

591

Last Page

596

Volume

302

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