State Dependent Riccati Equation Filter for a Rapid Thermal Processing system

Document Type

Conference Proceeding

Publication Date

12-1-1997

Abstract

State Dependent Algebraic Riccati Equation Filter (SDAREF) has been successfully applied to a Rapid Thermal Processing system. SDAREF with a special parametrization of dynamics and sensor model (optical pyrometers) gives substantially better results than the Extended Kalman Filter.

Identifier

0031347613 (Scopus)

Publication Title

Proceedings of the IEEE Conference on Decision and Control

ISSN

01912216

First Page

2547

Last Page

2548

Volume

3

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