Editorial Introduction to the Special Section on Petri Nets in Semiconductor Manufacturing

Document Type

Syllabus

Publication Date

1-1-1998

Identifier

85008030916 (Scopus)

Publication Title

IEEE Transactions on Semiconductor Manufacturing

External Full Text Location

https://doi.org/10.1109/TSM.1998.705369

e-ISSN

15582345

ISSN

08946507

First Page

330

Last Page

332

Issue

3

Volume

11

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