Evaluating cleanroom wipers to establish performance benchmarks

Authors

Osmond Atterbury, ITW Texwipe
Himansu R. Bhattacharjee, Wayne State University
Douglas W. Cooper, Harvard University
J. Ronald Dominique, New Jersey Institute of Technology
Steven J. Paley, Stanford University
William R. Paley, Columbia University
Howard Siegerman, University of Toronto

Document Type

Article

Publication Date

5-1-1998

Identifier

0040884128 (Scopus)

Publication Title

Micro

ISSN

10810595

First Page

51

Last Page

56

Issue

5

Volume

16

Recommended Citation

Atterbury, Osmond; Bhattacharjee, Himansu R.; Cooper, Douglas W.; Dominique, J. Ronald; Paley, Steven J.; Paley, William R.; and Siegerman, Howard, "Evaluating cleanroom wipers to establish performance benchmarks" (1998). Faculty Publications. 16342.
https://digitalcommons.njit.edu/fac_pubs/16342