Hands-on MEMS

Document Type

Conference Proceeding

Publication Date

9-1-2003

Abstract

We have developed an innovative MEMS education program that combines virtual fabrication with actual testing of classic MEMS devices. This approach is suitable both for large classes and in university environments that do not have access to large fabrication facilities. Under NSF funding, we are currently refining the curriculum to allow the course to be easily adopted by other schools.

Identifier

0041940111 (Scopus)

Publication Title

Biennial University Government Industry Microelectronics Symposium Proceedings

ISSN

07496877

First Page

157

Last Page

160

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