Synthesis and characterization of atmospheric pressure chemically vapor deposited aluminum

Document Type

Conference Proceeding

Publication Date

1-1-2007

Abstract

As part of a commercial development effort to produce atmospheric pressure chemically vapor deposited (APCVD) aluminum, the physical and chemical properties of deposited aluminum coatings have been investigated. FUZEBOX® technology has been utilized in the aluminization process through thermally induced decomposition of various precursors including industrial-grade aluminum alkyls. The aluminum coatings were found to exhibit excellent step coverage with throwing power values ranging between 0.56 and 1.00 depending on the internal geometry of the substrate and precursor composition. The structural analysis revealed that the coatings are polycrystalline (face centered cubic) with diffraction patterns equivalent to those of an aluminum powder reference. The compositional analysis showed that the coatings consist essentially of pure aluminum with traces of oxygen, carbon, and hydrogen. Electrical and mechanical characterization of the coatings yielded desirable values for resistivity (3.5 ± 0.1 μohm-cm) and adhesion strength (680 - 702 kg/cm2). The density measurements conducted by He pycnometry yielded an average value for the Al coatings of 2.60 ± 0.04 g/cm3. Copyright © 2007 MS & T07®.

Identifier

58349095809 (Scopus)

ISBN

[9781605601335]

Publication Title

Materials Science and Technology Conference and Exhibition MS and T 07 Exploring Structure Processing and Applications Across Multiple Materials Systems

First Page

1982

Last Page

1992

Volume

3

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