Synthesis of controllably grown carbon nanotubes interconnects

Document Type

Conference Proceeding

Publication Date

1-1-2007

Abstract

Carbon nanotube (CNT) intra-connects (bridges spanning across in-plane electrodes) were fabricated. We have assessed several growth methods for these intra-connects: Plasma Enhanced Chemical Vapor Deposition with CO precursor (PECVD/CO), CVD/ethanol and pyrolitic CVD/CO. PECVD/CO has been used with a mixture of CO/H2 at relatively low temperatures. Its yield was relatively low and quality of the intra-connects was not to par. CVD/ethanol resulted in many more multi-wall carbon nanotubes (MWCNT) than single-wall carbon nanotube (SWCNT) intra-connects. CVD/CO was the most effective and simplest way to grow CNT intra-connects among the three methods, yielding well-aligned and straight SWCNT bridges. © 2007 Materials Research Society.

Identifier

70349895894 (Scopus)

ISBN

[9781605604251]

Publication Title

Materials Research Society Symposium Proceedings

External Full Text Location

https://doi.org/10.1557/proc-1018-ee05-02

ISSN

02729172

First Page

44

Last Page

48

Volume

1018

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