Microfabricated implantable pressure sensor for flow measurement
Document Type
Conference Proceeding
Publication Date
3-31-2008
Abstract
A RF wireless capacitive pressure sensor is developed. The sensor has integrated inductor with the pressure sensitive capacitor as LC circuit. The resonant frequency of the sensor changes as the capacitance changes with applied pressure. The sensor uses LPCVD silicon nitride as sensitive membrane and the residual stress of the membrane has been measure as 139MPa. The sensor has size of 10 mm × 4 mm ×0.5 um. The sensor presents a pressure sensitivity of 1.65 MHz/cmH2O in pressure range of 0-20 CmH2O. The deflection of different shape of membranes is discussed. The deflection of square membrane is 130% to circular membrane under same applied pressure.
Identifier
41149085997 (Scopus)
ISBN
[9780819470591]
Publication Title
Proceedings of SPIE the International Society for Optical Engineering
External Full Text Location
https://doi.org/10.1117/12.763740
ISSN
0277786X
Volume
6884
Recommended Citation
Liu, Sheng; Farrow, Reginald; Zunino, James L.; Lim, Hee C.; Federici, John; and Thomas, Gordon, "Microfabricated implantable pressure sensor for flow measurement" (2008). Faculty Publications. 12847.
https://digitalcommons.njit.edu/fac_pubs/12847
