A Petri net method for schedulability and scheduling problems in single-arm cluster tools with wafer residency time constraints

Document Type

Conference Proceeding

Publication Date

5-1-2008

Abstract

With wafer residency time constraints for some wafer fabrication processes, such as low pressure chemicalvapor deposition, the schedulability and scheduling problems are still open. This paper aims to solve both problems. A Petri net (PN) model is developed for the system. This model describes when the robot should wait and a robot wait is modeled as an event in an explicit way. Thus, to schedule a single-arm cluster tool with wafer residency time constraint is to decide how long a robot wait should be. Based on this model, for the first time, we present the necessary and sufficient conditions under which a single-arm cluster tool with residency time constraints is schedulable, which can be checked analytically. Meanwhile, a closed form scheduling algorithm is developed to find an optimal periodic schedule if it is schedulable. Also, a simple method is presented for the implementation of the periodic schedule for steady state, which is not seen in any previous work. © 2006 IEEE.

Identifier

43849109024 (Scopus)

Publication Title

IEEE Transactions on Semiconductor Manufacturing

External Full Text Location

https://doi.org/10.1109/TSM.2008.2000425

ISSN

08946507

First Page

224

Last Page

236

Issue

2

Volume

21

Grant

60574066

Fund Ref

National Science Foundation

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