Center embossed diaphragm design guidelines and Fabry-Perot diaphragm fiber optic sensor

Document Type

Article

Publication Date

5-1-2008

Abstract

This research established the design guidelines for center embossed diaphragms for micro-diaphragm fiber type sensors. Following the guidelines, a center embossed diaphragm fiber optic sensor (CE-DFOS) based on Fabry-Perot interference was designed and fabricated with micro-electro-mechanical system (MEMS) technology. The CE-DFOS was experimentally verified to have the designed intrinsic frequency, and demonstrated high sensitivity in parallel testing with a piezoelectric (PZT) sensor. © 2008 Elsevier Ltd. All rights reserved.

Identifier

43049177722 (Scopus)

Publication Title

Microelectronics Journal

External Full Text Location

https://doi.org/10.1016/j.mejo.2007.12.020

ISSN

00262692

First Page

711

Last Page

716

Issue

5

Volume

39

Grant

PSE&G

Fund Ref

Nanjing Institute of Technology

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