GaN thin films on z- and x-cut LiNbO3 substrates by MOVPE
Document Type
Conference Proceeding
Publication Date
12-1-2008
Abstract
We report epitaxial growth of GaN layers on z- and x-cut LiNbO3 substrates using MOVPE. GaN layers with the thickness of 450 nm were characterized using X-ray diffraction. For both, z- and x-cut orientations of LiNbO3 substrates, the GaN layers have c-axis orientation normal to the substrate plane and the in-plane lattice orientation of GaN layers coincides with the primary axes of LiNbO3 substrates. Although GaN layers exhibit almost complete strain relaxation, the residual compressive strain determined with respect to a freestanding GaN is of the order of +0.37% and +0.2% for z- and x-cut substrates, respectively. © 2008 Wiley-VCH Verlag GmbH & Co. KGaA.
Identifier
50849143992 (Scopus)
Publication Title
Physica Status Solidi C Current Topics in Solid State Physics
External Full Text Location
https://doi.org/10.1002/pssc.200778490
e-ISSN
16101642
ISSN
18626351
First Page
1565
Last Page
1567
Issue
6
Volume
5
Recommended Citation
Ougazzaden, A.; Moudakir, T.; Aggerstam, T.; Orsal, G.; Salvestrini, J. P.; Gautierand, S.; and Sirenko, A. A., "GaN thin films on z- and x-cut LiNbO3 substrates by MOVPE" (2008). Faculty Publications. 12573.
https://digitalcommons.njit.edu/fac_pubs/12573
