GaN thin films on z- and x-cut LiNbO3 substrates by MOVPE

Document Type

Conference Proceeding

Publication Date

12-1-2008

Abstract

We report epitaxial growth of GaN layers on z- and x-cut LiNbO3 substrates using MOVPE. GaN layers with the thickness of 450 nm were characterized using X-ray diffraction. For both, z- and x-cut orientations of LiNbO3 substrates, the GaN layers have c-axis orientation normal to the substrate plane and the in-plane lattice orientation of GaN layers coincides with the primary axes of LiNbO3 substrates. Although GaN layers exhibit almost complete strain relaxation, the residual compressive strain determined with respect to a freestanding GaN is of the order of +0.37% and +0.2% for z- and x-cut substrates, respectively. © 2008 Wiley-VCH Verlag GmbH & Co. KGaA.

Identifier

50849143992 (Scopus)

Publication Title

Physica Status Solidi C Current Topics in Solid State Physics

External Full Text Location

https://doi.org/10.1002/pssc.200778490

e-ISSN

16101642

ISSN

18626351

First Page

1565

Last Page

1567

Issue

6

Volume

5

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