Directed self-assembly of individual vertically aligned carbon nanotubes

Document Type

Article

Publication Date

12-11-2008

Abstract

The deposition of high-aspect-ratio particles such as carbon nanotubes may be done in sub-100-nm windows in insulating thin films over metal using electrophoresis. Surface charge on the insulator causes the windows to become nanoscopic electrostatic lenses. Under certain conditions only one nanotube will be deposited at the base of a window. Finite element analysis shows that the number of deposited nanotubes is controlled by the electric field and the geometry of the windows and nanotubes. This discovery enables the process integration of carbon-based electronics with more traditional technologies such as complementary metal oxide semiconductor using the current generation of lithography and process technology. Devices such as vertical field effect transistors and interconnected nanoprobe arrays may now be fabricated in the metal levels to facilitate three-dimensional polylithic circuit architectures. © 2008 American Vacuum Society.

Identifier

57249086299 (Scopus)

Publication Title

Journal of Vacuum Science and Technology B Microelectronics and Nanometer Structures

External Full Text Location

https://doi.org/10.1116/1.2990788

ISSN

10711023

First Page

2524

Last Page

2528

Issue

6

Volume

26

Fund Ref

Defense Advanced Research Projects Agency

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