Rotatable broadband retarders for far-infrared spectroscopic ellipsometry

Document Type

Article

Publication Date

2-28-2011

Abstract

Rotatable retarders have been developed for applications in spectroscopic, full Mueller Matrix ellipsometry in the far-IR spectral range. Several materials, such as silicon, KRS-5, and a commercial polymer plastic (TOPAS) have been utilized to achieve a fully adjustable retardation between 0° and 90°. Experimental characteristics of the rotatable retarders that utilize three- and four-bounce designs are compared with calculations. We discuss the effect of light focusing on the performance of these rotatable retarders. © 2010 Elsevier B.V. All rights reserved.

Identifier

79952620139 (Scopus)

Publication Title

Thin Solid Films

External Full Text Location

https://doi.org/10.1016/j.tsf.2010.12.057

ISSN

00406090

First Page

2698

Last Page

2702

Issue

9

Volume

519

Grant

DE-AC02-98CH10886

Fund Ref

U.S. Department of Energy

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