Document Type
Thesis
Date of Award
8-30-1991
Degree Name
Master of Science in Electrical Engineering - (M.S.)
Department
Electrical and Computer Engineering
First Advisor
Durgamadhab Misra
Second Advisor
Kenneth Sohn
Third Advisor
N. M. Ravindra
Abstract
The thesis details the design for a novel microengineered beam diaphragm structure for piezoresistive pressure sensor applications. The beam diaphragm structure is used as a pressure sensing device, within a Wheatstone bridge circuit. The single crystal silicon with [100] orientation is used for the beam diaphragm structure.
It has the advantages of high sensitivity(2.56 v/v/mm of Hg), good linearity(3Kpa to 1.4 Mpa) and overpressure protection with the help of the bosses. It's protection range is about 400 times the standard pressure range. The beam diaphragm structure has two rectangular bosses which are formed by anisotropic etching. Two pairs of diffused piezoresistive elements are located on the top surface of the diaphragm such that higher sensitivity can be obtained. Finite Element Method is used to analyse the load deflection behavior of the beam diaphragm structure. Results of the Finite Element Method using ANSYS program are presented. Analytical results are compared with FEM results and verified. The micromachining process for the fabrication is also described.
Recommended Citation
Shah, Alkesh, "A microengineered beam diaphragm structure for the high performance pressure sensor" (1991). Theses. 2609.
https://digitalcommons.njit.edu/theses/2609
